1991
Foundation of Nanofilm Technology GmbH as a spin-off of the Max-Planck-Institute (MPI) for biophysical chemistry in Goettingen, Germany
First product: Nanofilm’s „Brewster Angle Microscope BAM1“
1992
Distribution partnership between JRS Instruments, (CH) and Nanofilm (DE) for vibration isolation systems as an accessory for Brewster Angle Microscopy
1994
Halcyonics got independent as a german GbR as a specialist for vibration isolation systems for any vibration sensitive measurement equipment
1996
Foundation of Halcyonics GmbH as a spin off of Nanofilm Technologie GmbH as the specialist for Active Vibration Isolation
1997
Introduction of the worldwide first Imaging Ellipsometer Nanofilm’s “I-Elli2000“
2000
Foundation of „Accurion Inc.“ in the Silicon Valley (USA) as a sales office for North America.
History
2001
Halcyonics separating from JRS and building up its own production and starts continuous redevelopment in technology and product design to fit customer needs
2002
Introduction of Nanofilm’s new „Imaging Ellipsometer platform EP³“
2003
Introduction of Nanofilm’s Imaging Ellipsometer EP³SPR for biotechnology applications
2004
Introduction of the worldwide first „Spectroscopic Imaging Ellipsometer EP³SE“ by Nanofilm
Introduction of Halcyonics VarioControl, a new active isolation technology.
2005
Introduction of Halcyonics Micro40 system.
2008
Nanofilm becomes a Division of Halcyonics GmbH
Introduction of the worlds smallest active vibration isolation system Halcyonics Nano20.
2009
Halcyonics and Nanofilm Announce Union Under Accurion Name
Accurion moved to its new facility at Stresemannstr. 30, 37079 Goettingen, Germany
Halcyonics separating from JRS and building up its own production and starts continuous redevelopment in technology and product design to fit customer needs
2002
Introduction of Nanofilm’s new „Imaging Ellipsometer platform EP³“
2003
Introduction of Nanofilm’s Imaging Ellipsometer EP³SPR for biotechnology applications
2004
Introduction of the worldwide first „Spectroscopic Imaging Ellipsometer EP³SE“ by Nanofilm
Introduction of Halcyonics VarioControl, a new active isolation technology.
2005
Introduction of Halcyonics Micro40 system.
2008
Nanofilm becomes a Division of Halcyonics GmbH
Introduction of the worlds smallest active vibration isolation system Halcyonics Nano20.
2009
Halcyonics and Nanofilm Announce Union Under Accurion Name
Accurion moved to its new facility at Stresemannstr. 30, 37079 Goettingen, Germany