Functional Coatings on Cantilevers
ABSTRACT
Graphene and graphene oxide layers are localized and charcterized on different substrate materials by means of the spectroscopic imaging ellipsometer nanofilm ep3se. The thickness and the dispersion functions of the refractive index n and of the extinction k of a few μm-wide layers are obtained. The results of imaging ellipsometry agree with the results obtained by the combination of AFM and confocal microscopy within the error margins. By contrast to the latter methods the measurement time is much shorter with imaging ellipsometry.
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Graphene and graphene oxide layers are localized and charcterized on different substrate materials by means of the spectroscopic imaging ellipsometer nanofilm ep3se. The thickness and the dispersion functions of the refractive index n and of the extinction k of a few μm-wide layers are obtained. The results of imaging ellipsometry agree with the results obtained by the combination of AFM and confocal microscopy within the error margins. By contrast to the latter methods the measurement time is much shorter with imaging ellipsometry.
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Application Note Cantilevers