Real-time monitoring of polyelectrolyte-multilayer growth onto tantalum pentoxide (Ta2O5) by internal reflection ellipsometry

The consecutive deposition of layers of two polyelectrolytes, polyallylamine hydrochloride (PAH) and polyacrylic acid (PAA) onto a tantalum pentoxide substrate was measured by time-resolved ellipsometry in an internal reflection ellipsometry setup. Stepwise increase of polyelectrolyte thickness was shown by time-resolved measurement of the ellipsometric angles, delta and psi. The coated substrate was finally characterized in the dry state.

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