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Dr. Peter Thiesen - Senior Application Specialist Accurion

Dr. Peter Thiesen

Senior Application Specialist

Phone: +49-551-9996020

Mail: pt@accurion.com

Daniela Bogner - Sales Manager Accurion

Daniela Bogner

Sales Manager

Phone: +49-551-9996013

Mail: db@accurion.com

Linda Thieme - Sales Manager Accurion

Linda Thieme

Sales Manager

Phone: +49-551-9996016

Mail: lth@accurion.com

Sebastian Funke - Application Specialist, 2D Materials Accurion

Sebastian Funke

Application Specialist, 2D Materials

Phone: +49-551-999600

Mail: sfu@accurion.com

Christian Röling - Application Specialist, Sample Measurements Accurion

Christian Röling

Application Specialist, Sample Measurements

Phone: +49-551-999600

Mail: cr@accurion.com

Stephan Ferneding - Chief Executive Officer Accurion

Stephan Ferneding

Chief Executive Officer

Phone: +49-551-999600

Mail:

Greg Hearn - Technical Sales Manager Accurion

Greg Hearn

Technical Sales Manager

Phone: +1-408-966-3171

Mail: gh@accurion.com

Narayana Sharma - Sales and Application Accurion

Narayana Sharma

Sales and Application

Phone: +91-98450 04273

Mail: sharma@accurion.com

Frank Zuo - Sales and Application Accurion

Frank Zuo

Sales and Application

Phone: +86-21 5017 9099

Mail: fz@accurion.cn

Dr. Antonio Gonzalez - Service and LB-Application Specialist Accurion

Dr. Antonio Gonzalez

Service and LB-Application Specialist

Phone: +49-551-9996035

Mail: ago@accurion.com

Arash Mirhamed - Product Manager Accurion

Arash Mirhamed

Product Manager

Phone: +49-551-9996015

Mail: am@accurion.com

Holger Grube - Service Engineer Accurion

Holger Grube

Service Engineer

Phone: +49-551-9996023

Mail: hog@accurion.com

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Imaging Ellipsometry - Nulling Ellipsometry

Ellipsometry is a well-known non-destructive optical method for determining film thickness and optical properties. It measures the change in the state of polarization of the light reflected off the film«s surface.

Fast ellipsometry methods, single or multi-wavelength, have been adopted for monitoring film growth in situ, allowing for the precise control of film deposition processes. 

The advancement of spectroscopic ellipsometers has extended the analytical power of ellipsometry to complex multilayer coatings, where several optical parameters (refractive index, extinction coefficient, film thickness, roughness anisotropy, etc.) can be determined simultaneously.

Ellipsometry remains a macroanalysis technique, i.e., the sample size cannot be any smaller than a few millimeters. The development of imaging ellipsometry (Figure2), which combines the power of ellipsometry with microscopy, has overcome this limitation. The enhanced spatial resolution of imaging ellipsometers potentially expands ellipsometry into new areas of microanalysis, microelectronics, and bio analytics.

The unique imaging ellipsometer ep4 operates on the principle of classical null ellipsometry and real-time ellipsometric contrast imaging. The laser beam is elliptically polarized after it passes through a linear polarizer (P) and a quarter-wave plate (C). The elliptically polarized light is then reflected off the sample (S) onto an analyzer (A) and imaged onto a CCD camera through a long working distance objective. 

In this PCSA configuration, the orientation of the angles of P and C is chosen in such a way that the elliptically polarized light is completely linear polarized after it is reflected off the sample. As shown in Figure3, the ellipsometric null condition is obtained when A "crossesÓ with respect to the polarization axis of the relected light, i.e., the state at which the absolute minimum of light flux is detected at the CCD camera.
The angles of P, C, and A that obtained the null condition are related to the optical properties of the sample. Reduction of the measured data with computerized optical modeling leads to a deduction of film thickness and the complex refractive indexes.

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